 Title: | 3rd International Extreme Ultra-Violet Lithography (EUVL) Symposium 2004 | Desc: | Proceedings of a meeting held 1-4 November 2004, Miyazaki, Japan.
| ISBN: | 9781604236781 | Pages: | 2,753 (4 Vols) | Format: | Softcover | TOC: | View Table of Contents | Publ: | Sematech | POD Publ: | Curran Associates, Inc. ( Mar 2007 ) |
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