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EXTREME ULTRA-VIOLET LITHOGRAPHY (EUVL) SYMPOSIUM. INTERNATIONAL. 3RD 2004. (4 VOLS)

EXTREME ULTRA-VIOLET LITHOGRAPHY (EUVL) SYMPOSIUM. INTERNATIONAL. 3RD 2004. (4 VOLS)

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EXTREME ULTRA-VIOLET LITHOGRAPHY (EUVL) SYMPOSIUM. INTERNATIONAL. 3RD 2004. (4 VOLS)
Item #: 00427
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$156.00
Product Description
Title:3rd International Extreme Ultra-Violet Lithography (EUVL) Symposium 2004
Desc:Proceedings of a meeting held 1-4 November 2004, Miyazaki, Japan.
ISBN:9781604236781
Pages:2,753 (4 Vols)
Format:Softcover
TOC:View Table of Contents
Publ:Sematech
POD Publ:Curran Associates, Inc. ( Mar 2007 )
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