EXTREME ULTRA-VIOLET LITHOGRAPHY (EUVL) SYMPOSIUM. INTERNATIONAL. 3RD 2004. (4 VOLS)

Item #: 00427

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$156.00

Title:	3rd International Extreme Ultra-Violet Lithography (EUVL) Symposium 2004
Desc:	Proceedings of a meeting held 1-4 November 2004, Miyazaki, Japan.
ISBN:	9781604236781
Pages:	2,753 (4 Vols)
Format:	Softcover
TOC:	View Table of Contents
Publ:	Sematech
POD Publ:	Curran Associates, Inc. ( Mar 2007 )