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EXTREME ULTRA-VIOLET LITHOGRAPHY (EUVL) SYMPOSIUM. INTERNATIONAL. 2ND 2003. (3 VOLS)

EXTREME ULTRA-VIOLET LITHOGRAPHY (EUVL) SYMPOSIUM. INTERNATIONAL. 2ND 2003. (3 VOLS)

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EXTREME ULTRA-VIOLET LITHOGRAPHY (EUVL) SYMPOSIUM. INTERNATIONAL. 2ND 2003. (3 VOLS)
Item #: 00428
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$243.00
Product Description
Title:2nd International Extreme Ultra-Violet Lithography (EUVL) Symposium 2003
Desc:Proceedings of a meeting held 30 September - 2 October 2003, Antwerp, Belgium.
ISBN:9781604236798
Pages:1,843 (3 Vols)
Format:Softcover
TOC:View Table of Contents
Publ:Sematech
POD Publ:Curran Associates, Inc. ( Apr 2007 )
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