 Title: | 4th International Extreme Ultra-Violet Lithography (EUVL) Symposium 2005 | Desc: | Proceedings of a meeting held 7-9 November 2005, San Diego, California.
| ISBN: | 9781604236804 | Pages: | 2,394 (4 Vols) | Format: | Softcover | TOC: | View Table of Contents | Publ: | Sematech | POD Publ: | Curran Associates, Inc. ( Apr 2007 ) |
| |  |