EXTREME ULTRA-VIOLET LITHOGRAPHY (EUVL) SYMPOSIUM. INTERNATIONAL. 4TH 2005. (4 VOLS)

Item #: 00429

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Title:	4th International Extreme Ultra-Violet Lithography (EUVL) Symposium 2005
Desc:	Proceedings of a meeting held 7-9 November 2005, San Diego, California.
ISBN:	9781604236804
Pages:	2,394 (4 Vols)
Format:	Softcover
TOC:	View Table of Contents
Publ:	Sematech
POD Publ:	Curran Associates, Inc. ( Apr 2007 )