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EXTREME ULTRA-VIOLET LITHOGRAPHY (EUVL) SYMPOSIUM. INTERNATIONAL. 4TH 2005. (4 VOLS)

EXTREME ULTRA-VIOLET LITHOGRAPHY (EUVL) SYMPOSIUM. INTERNATIONAL. 4TH 2005. (4 VOLS)

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EXTREME ULTRA-VIOLET LITHOGRAPHY (EUVL) SYMPOSIUM. INTERNATIONAL. 4TH 2005. (4 VOLS)
Item #: 00429
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$243.00
Product Description
Title:4th International Extreme Ultra-Violet Lithography (EUVL) Symposium 2005
Desc:Proceedings of a meeting held 7-9 November 2005, San Diego, California.
ISBN:9781604236804
Pages:2,394 (4 Vols)
Format:Softcover
TOC:View Table of Contents
Publ:Sematech
POD Publ:Curran Associates, Inc. ( Apr 2007 )
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