 Title: | Analytical Techniques for Semiconductor Materials and Process Characterization 5 (ALTECH 2007) | Desc: | Proceedings of a meeting held 13-14 September 2007, Munich, Germany.
| Series: | ECS Transactions Volume 10 No.01 | Editor: | Kolbesen, B.O. | ISBN: | 9781604238259 | Pages: | 161 (1 Vol) | Format: | Softcover | TOC: | View Table of Contents | Publ: | Electrochemical Society ( ECS ) | POD Publ: | Curran Associates, Inc. ( Mar 2008 ) |
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