 Title: | 18th Advanced Equipment Control/Advanced Process Control Symposium 2006 | Desc: | Proceedings of a meeting held 30 September - 4 October 2006, Westminster, Colorado.
| ISBN: | 9781605607177 | Pages: | 200 (1 Vol) | Format: | Softcover | TOC: | View Table of Contents | Publ: | Sematech | POD Publ: | Curran Associates, Inc. ( Jun 2009 ) |
| |  |