| Title: | 2009 IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC) |
| Desc: | Proceedings of a meeting held 11-13 May 2009, Berlin, Germany.
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| Sponsor: | Institute of Electrical and Electronics Engineers ( IEEE ) |
| Prod#: | CFP09ASC-CDR |
| ISBN: | 9781424436156 |
| Pages: | 0 |
| Format: | Cd-Rom |
| Publisher: | Institute of Electrical and Electronics Engineers ( IEEE ) |
| Notes: | Authorized distributor of all IEEE proceedings |