 Title: | 2012 23rd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2012) | Desc: | Proceedings of a meeting held 15-17 May 2012, Saratoga Springs, New York, USA.
| Prod#: | CFP12ASC-POD | ISBN: | 9781467303507 | Pages: | 419 (1 Vol) | Format: | Softcover | Notes: | Authorized distributor of all IEEE proceedings | TOC: | View Table of Contents | Publ: | Institute of Electrical and Electronics Engineers ( IEEE ) | POD Publ: | Curran Associates, Inc. ( Jul 2012 ) |
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