 Title: | Atomic Layer Deposition Applications 11 | Desc: | Proceedings of a meeting held 11-15 October 2015, Phoenix, Arizona, USA.
| Series: | ECS Transactions Volume 69 No.07 | Editor: | Roozeboom, F. et al. | ISBN: | 9781623323141 | Pages: | 271 (1 Vol) | Format: | Softcover | TOC: | View Table of Contents | Publ: | Electrochemical Society ( ECS ) | POD Publ: | Curran Associates, Inc. ( Jun 2016 ) |
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