 | Title: | Chemical Mechanical Polishing 11 | | Desc: | Proceedings of a meeting held 10-15 October 2010, Las Vegas, Nevada, USA.
218th ECS Meeting | | Series: | ECS Transactions Volume 33 No.10 | | Editor: | Banerjee, G. et al. | | ISBN: | 9781607681793 | | Pages: | 190 (1 Vol) | | Format: | Softcover | | TOC: | View Table of Contents | | Publ: | Electrochemical Society ( ECS ) | | POD Publ: | Curran Associates, Inc. ( Sep 2017 ) |
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