Details
- Title: Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 10
- Subtitle: 212th ECS Meeting
- Date/Location: Held 7-12 October 2007, Washington, DC, USA.
- Series: ECS Transactions Volume 11 No.02
- Editor: Hattori, T. et al.
- ISBN: 9781713819615
- Pages: 481 (1 Vol)
- Format: Softcover
- TOC Link: View Table of Contents
- Publisher: Electrochemical Society (ECS)
- POD Publisher: Curran Associates, Inc. ( Nov 2020 )
Description
Members/Attendees
Tab 4
- Title: Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 10
- Subtitle: 212th ECS Meeting
- Date/Location: Held 7-12 October 2007, Washington, DC, USA.
- Series: ECS Transactions Volume 11 No.02
- Editor: Hattori, T. et al.
- ISBN: 9781713819615
- Pages: 481 (1 Vol)
- Format: Softcover
- TOC Link: View Table of Contents
- Publisher: Electrochemical Society (ECS)
- POD Publisher: Curran Associates, Inc. ( Nov 2020 )