32ND EUROPEAN MASK AND LITHOGRAPHY CONFERENCE

Item #: 46283

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$70.00

Title:	32nd European Mask and Lithography Conference
Desc:	Proceedings of a meeting held 21-22 June 2016, Dresden, Germany.
Series:	Proceedings of SPIE Volume 10032
Editor:	Behringer, Uwe F.W.
ISBN:	9781510604872
Pages:	236 (1 Vol) (approx)
Format:	Softcover
Publ:	SPIE - International Society For Optics and Photonics
POD Publ:	Curran Associates, Inc. ( Oct 2016 )