 Title: | Advances in Patterning Materials and Processes XXXIV | Desc: | Proceedings of a meeting held 27 February - 3 March 2017, San Jose, California, USA.
At SPIE Advanced Lithography | Series: | Proceedings of SPIE Volume 10146 | Editor: | Hohle, Christoph K. | ISBN: | 9781510607439 | Pages: | 508 (1 Vol) (approx) | Format: | Softcover | Publ: | SPIE - International Society for Optics and Photonics | POD Publ: | Curran Associates, Inc. ( May 2017 ) |
| |  |