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ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING VI

ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING VI

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ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING VI
Item #: 46399
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Title:Advanced Etch Technology for Nanopatterning VI
Desc:Proceedings of a meeting held 27 February - 1 March 2017, San Jose, California, USA. At SPIE Advanced Lithography
Series:Proceedings of SPIE Volume 10149
Editor:Engelmann, Sebastian U.
ISBN:9781510607491
Pages:196 (1 Vol) (approx)
Format:Softcover
Publ:SPIE - International Society For Optics and Photonics
POD Publ:Curran Associates, Inc. ( May 2017 )
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