 | Title: | Advances in Patterning Materials and Processes XXXV | | Desc: | Proceedings of a meeting held 27 February - 2 March 2018, San Jose, California, USA.
At SPIE Advanced Lithography | | Series: | Proceedings of SPIE Volume 10586 | | Editor: | Hohle, Christoph K. | | ISBN: | 9781510616646 | | Pages: | 376 (1 Vol) (approx) | | Format: | Softcover | | Publ: | SPIE - International Society For Optics and Photonics | | POD Publ: | Curran Associates, Inc. ( May 2018 ) |
| |  |
