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ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING VII

ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING VII

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ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING VII
Item #: 46761
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Title:Advanced Etch Technology for Nanopatterning VII
Desc:Proceedings of a meeting held 26-28 February 2018, San Jose, California, USA. At SPIE Advanced Lithography
Series:Proceedings of SPIE Volume 10589
Editor:Engelmann, Sebastian U.
ISBN:9781510616707
Pages:164 (1 Vol) (approx)
Format:Softcover
Publ:SPIE - International Society For Optics and Photonics
POD Publ:Curran Associates, Inc. ( May 2018 )
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