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DESIGN-PROCESS-TECHNOLOGY CO-OPTIMIZATION FOR MANUFACTURABILITY XIII

DESIGN-PROCESS-TECHNOLOGY CO-OPTIMIZATION FOR MANUFACTURABILITY XIII

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DESIGN-PROCESS-TECHNOLOGY CO-OPTIMIZATION FOR MANUFACTURABILITY XIII
Item #: 49337
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Title:Design-Process-Technology Co-optimization for Manufacturability XIII
Desc:Proceedings of a meeting held 27-28 February 2019, San Jose, California, USA. At SPIE Advanced Lithography
Series:Proceedings of SPIE Volume 10962
Editor:Cain, Jason P.
ISBN:9781510625716
Pages:314 (1 Vol)
Format:Softcover
TOC:View Table of Contents
Publ:SPIE - International Society For Optics and Photonics
POD Publ:Curran Associates, Inc. ( Jul 2019 )
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