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ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING VIII

ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING VIII

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ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING VIII
Item #: 49338
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Title:Advanced Etch Technology for Nanopatterning VIII
Desc:Proceedings of a meeting held 25-26 February 2019, San Jose, California, USA. At SPIE Advanced Lithography
Series:Proceedings of SPIE Volume 10963
Editor:Wise, Rich S.
ISBN:9781510625730
Pages:148 (1 Vol)
Format:Softcover
TOC:View Table of Contents
Publ:SPIE - International Society For Optics and Photonics
POD Publ:Curran Associates, Inc. ( Jul 2019 )
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