 Title: | 35th European Mask and Lithography Conference (EMLC 2019) | Desc: | Proceedings of a meeting held 17-19 June 2019, Dresden, Germany.
| Series: | Proceedings of SPIE Volume 11177 | Editor: | Behringer, Uwe F.W. | ISBN: | 9781510630673 | Pages: | 202 (1 Vol) | Format: | Softcover | TOC: | View Table of Contents | Publ: | SPIE - International Society for Optics and Photonics | POD Publ: | Curran Associates, Inc. ( Oct 2019 ) |
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