 | Title: | Advances in Patterning Materials and Processes XXXVII | | Desc: | Proceedings of a meeting held 24-26 February 2020, San Jose, California, USA.
At SPIE Advanced Lithography | | Series: | Proceedings of SPIE Volume 11326 | | Editor: | Gronheid, Roel | | ISBN: | 9781510634190 | | Pages: | 436 (1 Vol) | | Format: | Softcover | | TOC: | View Table of Contents | | Publ: | SPIE - International Society for Optics and Photonics | | POD Publ: | Curran Associates, Inc. ( Jun 2020 ) |
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