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ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING IX

ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING IX

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ADVANCED ETCH TECHNOLOGY FOR NANOPATTERNING IX
Item #: 54624
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Title:Advanced Etch Technology for Nanopatterning IX
Desc:Proceedings of a meeting held 25-26 February 2020, San Jose, California, USA. At SPIE Advanced Lithography
Series:Proceedings of SPIE Volume 11329
Editor:Wise, Rich S.
ISBN:9781510634251
Pages:126 (1 Vol)
Format:Softcover
TOC:View Table of Contents
Publ:SPIE - International Society for Optics and Photonics
POD Publ:Curran Associates, Inc. ( Jun 2020 )
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