 | Title: | SEMATECH Workshop on 3D Interconnect Metrology 2011 | | Desc: | Proceedings of a meeting held 13 July 2011, san Francisco, California, USA.
| | ISBN: | 9781618393913 | | Pages: | 164 (1 Vol) | | Format: | Softcover | | TOC: | View Table of Contents | | Publ: | Sematech | | POD Publ: | Curran Associates, Inc. ( Mar 2012 ) |
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