EXTREME ULTRAVIOLET LITHOGRAPHY. INTERNATIONAL SYMPOSIUM. 2009. (2 VOLS)

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010066
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Details

  • Title: International Symposium on Extreme Ultraviolet Lithography 2009
  • Date/Location: Held 18-21 October 2009, Prague, Czech Republic.
  • ISBN: 9781617821080
  • Pages: 1,929 (2 Vols)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: Sematech
  • POD Publisher: Curran Associates, Inc. ( Feb 2011 )

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Tab 4

 
  • Title: International Symposium on Extreme Ultraviolet Lithography 2009
  • Date/Location: Held 18-21 October 2009, Prague, Czech Republic.
  • ISBN: 9781617821080
  • Pages: 1,929 (2 Vols)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: Sematech
  • POD Publisher: Curran Associates, Inc. ( Feb 2011 )