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EXTREME ULTRAVIOLET LITHOGRAPHY. INTERNATIONAL SYMPOSIUM. 2009. (2 VOLS)
- Item #:
- 010066
- UPC:
Details
-
Title:
International Symposium on Extreme Ultraviolet Lithography 2009
-
Date/Location:
Held 18-21 October 2009, Prague, Czech Republic.
-
ISBN:
9781617821080
-
Pages:
1,929 (2 Vols)
-
Format:
Softcover
-
TOC Link:
View Table of Contents
-
Publisher:
Sematech
-
POD Publisher:
Curran Associates, Inc. ( Feb 2011 )
-
Title:
International Symposium on Extreme Ultraviolet Lithography 2009
-
Date/Location:
Held 18-21 October 2009, Prague, Czech Republic.
-
ISBN:
9781617821080
-
Pages:
1,929 (2 Vols)
-
Format:
Softcover
-
TOC Link:
View Table of Contents
-
Publisher:
Sematech
-
POD Publisher:
Curran Associates, Inc. ( Feb 2011 )