EXTREME ULTRAVIOLET LITHOGRAPHY. INTERNATIONAL SYMPOSIUM. 2013.

EXTREME ULTRAVIOLET LITHOGRAPHY. INTERNATIONAL SYMPOSIUM. 2013.

Item #:
021900
Our Price: $295.00
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Details

  • Title: International Symposium on Extreme Ultraviolet Lithography 2013
  • Date/Location: Held 6-10 October 2013, Toyama, Japan.
  • ISBN: 9781632662644
  • Pages: 899 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: Sematech
  • POD Publisher: Curran Associates, Inc. ( Jun 2014 )

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  • Title: International Symposium on Extreme Ultraviolet Lithography 2013
  • Date/Location: Held 6-10 October 2013, Toyama, Japan.
  • ISBN: 9781632662644
  • Pages: 899 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: Sematech
  • POD Publisher: Curran Associates, Inc. ( Jun 2014 )