Details
- Title: 2015 International Conference on Planarization/CMP Technology (ICPT 2015)
- Date/Location: Held 30 September - 2 October 2015, Chandler, Arizona, USA.
- IEEE #: CFP1563Z-POD
- ISBN: 9781467386647
- Pages: 259 (1 Vol)
- Format: Softcover
- TOC Link: View Table of Contents
- Publisher: Institute of Electrical and Electronics Engineers (IEEE)
- POD Publisher: Curran Associates, Inc. ( Apr 2016 )
Description
Members/Attendees
Tab 4
- Title: 2015 International Conference on Planarization/CMP Technology (ICPT 2015)
- Date/Location: Held 30 September - 2 October 2015, Chandler, Arizona, USA.
- IEEE #: CFP1563Z-POD
- ISBN: 9781467386647
- Pages: 259 (1 Vol)
- Format: Softcover
- TOC Link: View Table of Contents
- Publisher: Institute of Electrical and Electronics Engineers (IEEE)
- POD Publisher: Curran Associates, Inc. ( Apr 2016 )