EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY X

EXTREME ULTRAVIOLET (EUV) LITHOGRAPHY X

Item #:
048539
Our Price: $125.00
Adding to cart… The item has been added

Details

  • Title: Extreme Ultraviolet (EUV) Lithography X
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 25-28 February 2019, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 10957
  • Editor: Goldberg, Kenneth A.
  • ISBN: 9781510625617
  • Pages: 406 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( May 2019 )

Description

 

Members/Attendees

 

Tab 4

 
  • Title: Extreme Ultraviolet (EUV) Lithography X
  • Subtitle: At SPIE Advanced Lithography
  • Date/Location: Held 25-28 February 2019, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 10957
  • Editor: Goldberg, Kenneth A.
  • ISBN: 9781510625617
  • Pages: 406 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( May 2019 )