METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVIII (2 PARTS)

METROLOGY, INSPECTION, AND PROCESS CONTROL XXXVIII (2 PARTS)

Item #:
075533
Our Price: $215.00
Adding to cart… The item has been added

Details

  • Title: Metrology, Inspection, and Process Control XXXVIII
  • Subtitle: At SPIE Advanced Lithography + Patterning
  • Date/Location: Held 25-29 February 2024, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 12955
  • Editor: Sendelbach, Matthew J.
  • ISBN: 9781510672161
  • Pages: 994 (2 Vols)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Aug 2024 )

Description

 

Members/Attendees

 

Tab 4

 
  • Title: Metrology, Inspection, and Process Control XXXVIII
  • Subtitle: At SPIE Advanced Lithography + Patterning
  • Date/Location: Held 25-29 February 2024, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 12955
  • Editor: Sendelbach, Matthew J.
  • ISBN: 9781510672161
  • Pages: 994 (2 Vols)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Aug 2024 )