METROLOGY, INSPECTION, AND PROCESS CONTROL XXXIX (2 PARTS)

METROLOGY, INSPECTION, AND PROCESS CONTROL XXXIX (2 PARTS)

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080884
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Details

  • Title: Metrology, Inspection, and Process Control XXXIX
  • Subtitle: At SPIE Advanced Lithography + Patterning
  • Date/Location: Held 24-28 February 2025, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 13426
  • Editor: Sendelbach, Matthew J.
  • ISBN: 9781510686380
  • Pages: 1,204 (2 Vols)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Jul 2025 )

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  • Title: Metrology, Inspection, and Process Control XXXIX
  • Subtitle: At SPIE Advanced Lithography + Patterning
  • Date/Location: Held 24-28 February 2025, San Jose, California, USA.
  • Series: Proceedings of SPIE Volume 13426
  • Editor: Sendelbach, Matthew J.
  • ISBN: 9781510686380
  • Pages: 1,204 (2 Vols)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Jul 2025 )