MODELING ASPECTS IN OPTICAL METROLOGY X

MODELING ASPECTS IN OPTICAL METROLOGY X

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  • Title: Modeling Aspects in Optical Metrology X
  • Subtitle: At SPIE Optical Metrology
  • Date/Location: Held 23-26 June 2025, Munich, Germany.
  • Series: Proceedings of SPIE Volume 13568
  • Editor: Bodermann, Bernd
  • ISBN: 9781510690448
  • Pages: 258 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Oct 2025 )

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  • Title: Modeling Aspects in Optical Metrology X
  • Subtitle: At SPIE Optical Metrology
  • Date/Location: Held 23-26 June 2025, Munich, Germany.
  • Series: Proceedings of SPIE Volume 13568
  • Editor: Bodermann, Bernd
  • ISBN: 9781510690448
  • Pages: 258 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: SPIE - International Society for Optics and Photonics
  • POD Publisher: Curran Associates, Inc. ( Oct 2025 )