MATERIAL SYSTEMS AND PROCESSES FOR THREE-DIMENSIONAL MICRO- AND NANOSCALE FABRICATION AND LITHOGRAPHY. (SYMPOSIUM BB AT THE 2009 SPRING MRS MEETING)

MATERIAL SYSTEMS AND PROCESSES FOR THREE-DIMENSIONAL MICRO- AND NANOSCALE FABRICATION AND LITHOGRAPHY. (SYMPOSIUM BB AT THE 2009 SPRING MRS MEETING)

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006091
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  • Title: Material Systems and Processes for Three-Dimensional Micro- and Nanoscale Fabrication and Lithography
  • Subtitle: Symposium BB at the 2009 MRS Spring Meeting
  • Date/Location: Held 13-17 April 2009, San Francisco, California.
  • Series: Materials Research Society Symposium Proceedings Volume 1179
  • ISBN: 9781615673889
  • Pages: 62 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: Cambridge University Press (CUP) / Materials Research Society (MRS)
  • POD Publisher: Curran Associates, Inc. ( Oct 2009 )

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  • Title: Material Systems and Processes for Three-Dimensional Micro- and Nanoscale Fabrication and Lithography
  • Subtitle: Symposium BB at the 2009 MRS Spring Meeting
  • Date/Location: Held 13-17 April 2009, San Francisco, California.
  • Series: Materials Research Society Symposium Proceedings Volume 1179
  • ISBN: 9781615673889
  • Pages: 62 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: Cambridge University Press (CUP) / Materials Research Society (MRS)
  • POD Publisher: Curran Associates, Inc. ( Oct 2009 )