LithoSim: A Large, Holistic Lithography Simulation Benchmark for AI-Driven Semiconductor Manufacturing

Item #:

085713-5259

Details

DOI: https://doi.org/10.52202/085713-5259
Author(s): Hongquan He, Zhen Wang, Jingya Wang, Tao Wu, Xuming He, Bei Yu, Jingyi Yu, Hao GENG
Pages: 174770-174793 (24 pages)
Format: PDF Paper Download
Conference: Advances in Neural Information Processing Systems 38
Date/Location: Held 2-7 December 2025, San Diego, California, USA and 30 November - 5 December 2025, Mexico City, Mexico.
Series: Advances in Neural Information Processing Systems 38
Publisher: Neural Information Processing Systems Foundation, Inc. (NeurIPS)

DOI: https://doi.org/10.52202/085713-5259
Author(s): Hongquan He, Zhen Wang, Jingya Wang, Tao Wu, Xuming He, Bei Yu, Jingyi Yu, Hao GENG
Pages: 174770-174793 (24 pages)
Format: PDF Paper Download
Conference: Advances in Neural Information Processing Systems 38
Date/Location: Held 2-7 December 2025, San Diego, California, USA and 30 November - 5 December 2025, Mexico City, Mexico.
Series: Advances in Neural Information Processing Systems 38
Publisher: Neural Information Processing Systems Foundation, Inc. (NeurIPS)