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IMMERSION LITHOGRAPHY EXTENSIONS. INTERNATIONAL SYMPOSIUM. 6TH 2009.
- Item #:
- 010065
- UPC:
Details
-
Title:
6th International Symposium on Immersion Lithography Extensions 2009
-
Date/Location:
Held 22-23 October 2009, Prague, Czech Republic.
-
ISBN:
9781617821073
-
Pages:
927 (1 Vol)
-
Format:
Softcover
-
TOC Link:
View Table of Contents
-
Publisher:
Sematech
-
POD Publisher:
Curran Associates, Inc. ( Feb 2011 )
-
Title:
6th International Symposium on Immersion Lithography Extensions 2009
-
Date/Location:
Held 22-23 October 2009, Prague, Czech Republic.
-
ISBN:
9781617821073
-
Pages:
927 (1 Vol)
-
Format:
Softcover
-
TOC Link:
View Table of Contents
-
Publisher:
Sematech
-
POD Publisher:
Curran Associates, Inc. ( Feb 2011 )