EVOLUTIONS IN PLANARIZATION: EQUIPMENT, MATERIALS, TECHNIQUES AND APPLICATIONS. (SYMPOSIUM BB AT THE 2013 MRS SPRING MEETING AND EXHIBIT)

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  • Title: Evolutions in Planarization: Equipment, Materials, Techniques and Applications
  • Subtitle: Symposium BB at the 2013 MRS Spring Meeting and Exhibit
  • Date/Location: Held 1-5 April 2013, San Francisco, California, USA.
  • Series: Materials Research Society Symposium Proceedings Volume 1560
  • Editor: Borst, C.
  • ISBN: 9781632661425
  • Pages: 94 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: Cambridge University Press (CUP) / Materials Research Society (MRS)
  • POD Publisher: Curran Associates, Inc. ( Apr 2014 )

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  • Title: Evolutions in Planarization: Equipment, Materials, Techniques and Applications
  • Subtitle: Symposium BB at the 2013 MRS Spring Meeting and Exhibit
  • Date/Location: Held 1-5 April 2013, San Francisco, California, USA.
  • Series: Materials Research Society Symposium Proceedings Volume 1560
  • Editor: Borst, C.
  • ISBN: 9781632661425
  • Pages: 94 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: Cambridge University Press (CUP) / Materials Research Society (MRS)
  • POD Publisher: Curran Associates, Inc. ( Apr 2014 )