SEMICONDUCTOR CLEANING SCIENCE AND TECHNOLOGY 14. (SCST 14) (AT THE 228TH ECS MEETING)

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030396
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Details

  • Title: Semiconductor Cleaning Science and Technology 14 (SCST 14)
  • Date/Location: Held 11-15 October 2015, Phoenix, Arizona, USA.
  • Series: ECS Transactions Volume 69 No.08
  • Editor: Hattori, T. et al.
  • ISBN: 9781623323158
  • Pages: 323 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: Electrochemical Society (ECS)
  • POD Publisher: Curran Associates, Inc. ( Jun 2016 )

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  • Title: Semiconductor Cleaning Science and Technology 14 (SCST 14)
  • Date/Location: Held 11-15 October 2015, Phoenix, Arizona, USA.
  • Series: ECS Transactions Volume 69 No.08
  • Editor: Hattori, T. et al.
  • ISBN: 9781623323158
  • Pages: 323 (1 Vol)
  • Format: Softcover
  • TOC Link: View Table of Contents
  • Publisher: Electrochemical Society (ECS)
  • POD Publisher: Curran Associates, Inc. ( Jun 2016 )