ADVANCED ETCH TECHNOLOGY AND PROCESS INTEGRATION FOR NANOPATTERNING XIV

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080887

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Title: Advanced Etch Technology and Process Integration for Nanopatterning XIV
Subtitle: At SPIE Advanced Lithography + Patterning
Date/Location: Held 25-27 February 2025, San Jose, California, USA.
Series: Proceedings of SPIE Volume 13429
Editor: Mohanty, Nihar
ISBN: 9781510686441
Pages: 206 (1 Vol)
Format: Softcover
TOC Link: View Table of Contents
Publisher: SPIE - International Society for Optics and Photonics
POD Publisher: Curran Associates, Inc. ( Jul 2025 )

Title: Advanced Etch Technology and Process Integration for Nanopatterning XIV
Subtitle: At SPIE Advanced Lithography + Patterning
Date/Location: Held 25-27 February 2025, San Jose, California, USA.
Series: Proceedings of SPIE Volume 13429
Editor: Mohanty, Nihar
ISBN: 9781510686441
Pages: 206 (1 Vol)
Format: Softcover
TOC Link: View Table of Contents
Publisher: SPIE - International Society for Optics and Photonics
POD Publisher: Curran Associates, Inc. ( Jul 2025 )