ADVANCED ETCH TECHNOLOGY AND PROCESS INTEGRATION FOR NANOPATTERNING XII

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069899

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Title: Advanced Etch Technology and Process Integration for Nanopatterning XII
Subtitle: At SPIE Advanced Lithography + Patterning
Date/Location: Held 28 February - 2 March 2023, San Jose, California, USA.
Series: Proceedings of SPIE Volume 12499
Editor: Mohanty, Nihar
ISBN: 9781510661059
Pages: 172 (1 Vol)
Format: Softcover
TOC Link: View Table of Contents
Publisher: SPIE - International Society for Optics and Photonics
POD Publisher: Curran Associates, Inc. ( Sep 2023 )

Title: Advanced Etch Technology and Process Integration for Nanopatterning XII
Subtitle: At SPIE Advanced Lithography + Patterning
Date/Location: Held 28 February - 2 March 2023, San Jose, California, USA.
Series: Proceedings of SPIE Volume 12499
Editor: Mohanty, Nihar
ISBN: 9781510661059
Pages: 172 (1 Vol)
Format: Softcover
TOC Link: View Table of Contents
Publisher: SPIE - International Society for Optics and Photonics
POD Publisher: Curran Associates, Inc. ( Sep 2023 )